Excellence in Research and Innovation for Humanity
%0 Journal Article
%A A. Manallah and  C. Meier
%D 2017 
%J  International Journal of Mathematical, Computational, Physical, Electrical and Computer Engineering
%B World Academy of Science, Engineering and Technology
%I International Science Index 127, 2017
%T Surface Topography Measurement by Confocal Spectral Interferometry
%U http://waset.org/publications/10007419
%V 127
%X Confocal spectral interferometry (CSI) is an innovative optical method for determining microtopography of surfaces and thickness of transparent layers, based on the combination of two optical principles: confocal imaging, and spectral interferometry. Confocal optical system images at each instant a single point of the sample. The whole surface is reconstructed by plan scanning. The interference signal generated by mixing two white-light beams is analyzed using a spectrometer. In this work, five ‘rugotests’ of known standard roughnesses are investigated. The topography is then measured and illustrated, and the equivalent roughness is determined and compared with the standard values.

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