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V. Swarnalatha and  A. V. Narasimha Rao and  P. Pal,  Study of Fast Etching of Silicon for the Fabrication of Bulk Micromachined MEMS Structures .   journal   = {International Journal of Chemical, Molecular, Nuclear, Materials and Metallurgical Engineering}, [online]. World Academy of Science, Engineering and Technology. December 2017, vol. 132(12). 823 - 826[viewed 18 July 2018]. Available from: http://waset.org/publications/10008313.