Open Science Research Excellence
@article{(International Science Index):http://waset.org/publications/12040,
  title    = {Three Dimensional MEMS Supercapacitor Fabricated by DRIE on Silicon Substrate},
  author    = {Wei Sun and  Ruilin Zheng and  Xuyuan Chen},
  country   = {},
  institution={},
  abstract  = {Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper, 
we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon 
dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.
},
    journal   = {International Journal of Electrical, Computer, Energetic, Electronic and Communication Engineering},  volume    = {3},
  number    = {10},
  year      = {2009},
  pages     = {1785 - 1788},
  ee        = {http://waset.org/publications/12040},
  url       = {http://waset.org/Publications?p=34},
  bibsource = {http://waset.org/Publications},
  issn      = {eISSN:1307-6892},
  publisher = {World Academy of Science, Engineering and Technology},
  index     = {International Science Index 34, 2009},
}