Excellence in Research and Innovation for Humanity
%0 Journal Article
%A Guojia Ma and  Guoqiang Lin and  Shuili Gong and  Gang Sun and  Dawang Wang
%D 2012 
%J  International Journal of Chemical, Molecular, Nuclear, Materials and Metallurgical Engineering
%B World Academy of Science, Engineering and Technology
%I International Science Index 68, 2012
%T The Influence of Substrate Bias on the Mechanical Properties of a W- and S-containing DLC-based Solid-lubricant Film
%U http://waset.org/publications/3529
%V 68
%X A diamond-like carbon (DLC) based solid-lubricant
film was designed and DLC films were successfully prepared using a
microwave plasma enhanced magnetron sputtering deposition
technology. Post-test characterizations including Raman
spectrometry, X-ray diffraction, nano-indentation test, adhesion test,
friction coefficient test were performed to study the influence of
substrate bias voltage on the mechanical properties of the W- and
S-doped DLC films. The results indicated that the W- and S-doped
DLC films also had the typical structure of DLC films and a better
mechanical performance achieved by the application of a substrate
bias of -200V.
%P 712 - 715