|Commenced in January 2007||Frequency: Monthly||Edition: International||Paper Count: 2|
In this paper, design of solid-state battery/supercapacitor emulator based on dc-dc boost converter is described. The emulator mimics charging behavior of any storage device based on a predefined behavior set by the user. The device is operated by a two-level control structure: high-level emulating controller and low- level input voltage controller. Simulation and experimental results are shown to demonstrate the emulator operation.
Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper, we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.