Open Science Research Excellence

Xuyuan Chen

Publications

2

Publications

2
7816
Speckle Characterization in Laser Projector Display
Abstract:
Speckle phenomena results from when coherent radiation is reflected from a rough surface. Characterizing the speckle strongly depends on the measurement condition and experimental setup. In this paper we report the experimental results produced with different parameters in the setup. We investigated the factors which affects the speckle contrast, such as, F-number, gamma value and exposure time of the camera, rather than geometric factors like the distance between the projector lens to the screen, the viewing distance, etc. The measurement results show that the speckle contrast decreases by decreasing F-number, by increasing gamma value, and slightly affects by exposure time of the camera and the gain value of the camera.
Keywords:
Characterization, laser projector, speckle
1
12040
Three Dimensional MEMS Supercapacitor Fabricated by DRIE on Silicon Substrate
Abstract:

Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper,  we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon  dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.

Keywords:
MEMS, Supercapacitor, DRIE, 3D.